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MEMS & Micro/Nano-Manufacturing

Peer-reviewed Conference Papers

C2. A MEMS device for fracture toughness measurement of 2D nano films under TEM imaging

Changhong Cao, Jane Y Howe, Daniel Yin, Tobin Filleter, Yu Sun

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), page 750-753

C1. Mechanical characterization of thin films using a MEMS device inside SEM

Changhong Cao, Brandon Chen, Tobin Filleter, Yu Sun

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), page 381-384

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