MEMS & Micro/Nano-Manufacturing

Changhong Cao*, Tongyu Wu, Yu Sun*

Changhong Cao, Zhuoran Zhang, Maedeh Amirmaleki, Jason Tam, Wenkun Dou, Tobin Filleter, and Yu Sun

Changhong Cao, Sankha Mukherjee, Jane Y Howe, Doug D Perovic, Yu Sun, Chandra Veer Singh, Tobin Filleter

Changhong Cao, Jane Y Howe, Doug Perovic, Tobin Filleter, Yu Sun

Changhong Cao, Matthew Daly, Brandon Chen, Jane Y Howe, Chandra Veer Singh, Tobin Filleter, Yu Sun

C2. A MEMS device for fracture toughness measurement of 2D nano films under TEM imaging

Changhong Cao, Jane Y Howe, Daniel Yin, Tobin Filleter, Yu Sun

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), page 750-753

C1. Mechanical characterization of thin films using a MEMS device inside SEM

Changhong Cao, Brandon Chen, Tobin Filleter, Yu Sun

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), page 381-384