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MEMS & Micro/Nano-Manufacturing

J35.Machine Learning-Driven Metastructure Design for Sensor-Free Linearization of MEMS Electrothermal Actuators

Lingzhi Zhang#, Hossein Mofatteh#, Jonathan Kong, Jane Y. Howe, Stas Dogel, Yu Sun*, Abdolhamid Akbarzadeh*, Changhong Cao*, Microsystems and Nanoengineering, 2025 

J26. Low-profile, large-range compressive strain sensing using micro-manufactured CNT micropillar arrays

Changhong Cao*, Michael S. H. Boutilier, Sanha Kim, S. Mohadeseh Taheri-Mousavi, Nigamaa Nayakanti, Ricardo Esteban Roberts-Ugrinovic, Crystal Owens, A. John Hart*

ACS Applied Materials & Interface, 2023 (Accepted)

Changhong Cao*, Tongyu Wu, Yu Sun*

J. Micromech. Microeng, 2021, 31 114004

Changhong Cao, Zhuoran Zhang, Maedeh Amirmaleki, Jason Tam, Wenkun Dou, Tobin Filleter, and Yu Sun

Applied Materials Today, 2019, Volume 14, Pages 102-107

Changhong Cao, Sankha Mukherjee, Jane Y Howe, Doug D Perovic, Yu Sun, Chandra Veer Singh, Tobin Filleter

Science Advances, 2018, 4: eaao7202

Changhong Cao, Jane Y Howe, Doug Perovic, Tobin Filleter, Yu Sun

Nanotechnology, 2016, 27(28) 28LT01

Changhong Cao, Matthew Daly, Brandon Chen, Jane Y Howe, Chandra Veer Singh, Tobin Filleter, Yu Sun

Nano Letters, 2015, 15 (10), 6528-6534

Peer-reviewed Conference Papers

C2. A MEMS device for fracture toughness measurement of 2D nano films under TEM imaging

Changhong Cao, Jane Y Howe, Daniel Yin, Tobin Filleter, Yu Sun

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), page 750-753

C1. Mechanical characterization of thin films using a MEMS device inside SEM

Changhong Cao, Brandon Chen, Tobin Filleter, Yu Sun

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), page 381-384

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