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Designated SEM for in-situ mechanical characterizations using MEMS and miniaturized tensile testers. 

Motion stage platform for developing 3D/4D high-resolution (10nm) printing mechanisms.

Four-point probe station with four manipulators, one with 1 micron movement resolution and 3 with 5 micron resolution. A micro force module is available on one of the manipulators with 100g load range for feedback force sensing during probing. 

Motion stage platform for building printing mechanisms

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